Tescan FIB-SEM Lyra3 XMU

Fully PC controlled Field Emission Gun SEM with Schottky FEG emitter in combination with a High Resolution Gallium Focused Ion Beam column and Gas Injection System (GIS) intended for high vacuum and variable pressure/low vacuum operations.

With high standard optical properties, flicker-free digital image with super clarity, the sophisticated user-friendly software for SEM/FIB/GIS control and image capturing uses Windows platform. The system utilises standard formats of stored images, easy image management processing and measurements, automatic set up of the system and many other automated operations are characteristic features of the instrument.

Unique three lens Wide Field Optics design offering a variety of work and display modes. Column construction allows fully automated column set-up and alignment without mechanical centring elements. External fore pump and below-chamber mounted turbo molecular pump combination obtains vacuum quickly and cleanly. Network operations and built-in remote access and diagnostics as standard, including, low pressure inlet option, and Low Vacuum Detector. The system is integrated with:

• 4 x Kleindiek NanoWorkstation SY-NW-000
• SuperFlat AFM SY-SFAFM-000
• Bruker QUANTAX Energy Dispersive X- ray Spectrometer (EDS)